High Power Impulse Magnetron Sputtering
  • Release Date : 13 September 2019
  • Publisher : Unknown
  • Categories : Technology & Engineering
  • Pages : 398 pages
  • ISBN 13 : 9780128124543
  • ISBN 10 : 0128124547
Score: 4
From 245 Ratings
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Synopsis : High Power Impulse Magnetron Sputtering written by Daniel Lundin, published by Unknown which was released on 13 September 2019. Download High Power Impulse Magnetron Sputtering Books now! Available in PDF, EPUB, Mobi Format. High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. Includes a comprehensive description of the HiPIMS process from fundamental physics to applications Provides a distinctive link between the process plasma and thin film communities Discusses the industrialization of HiPIMS and its real world applications

Cathodic Arcs

Cathodic Arcs

Author : André Anders
Publisher : Springer Science & Business Media
Category : Science
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